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Thin Film RTD Temperature Sensors Capacitive Humidity Sensors Mass Flow Sensors

Thermal Mass Flow SensorMeasurement Principle

Thermal mass flow sensors utilize heat transfer principles to determine the flow velocity of a fluid. As fluid passes across the sensor, heat is carried from the sensor to the medium.  This relationship is dependent upon the flow rate.  As flow increases, so does the amount of heat that is transferred. By knowing the temperature of the medium, the flow rate can be determined from the amount of voltage compensation needed to maintain a constant temperature differential.

Product Overview

IST thin film mass flow sensors offer solutions for a wide variety of flow applications.  The thin film and membrane technologies incorporate highly accurate temperature sensors and heaters as core elements of the sensors.  IST flow sensors are applicable in both gas and partially in liquid, have an operating temperature range of -30°C to +450°C, and can measure flow rate and direction from 0.0001m/s (microflowSens) to 100m/s (respectively from 1mL/min to 10L/min). In addition to measuring flow rates, our liquid sensors can detect the presence of a liquid, biofilm, or bubbles, as well as indicate liquid level .

Development channels guarantee the best possible adaptation of our sensors to the requirements of your application, whether in terms of dynamic range, response time, directional detection or ambient conditions. Connecting options such as different wires, solutions on flexible substrates or injection-molded encapsulations are available (denoted by letter A).

Product Selection

Gas Flow

Product
(Links to PDF)
Measuring Range
(m/s)
Sensitivity
(m/s)
Indicates Flow
Direction
Temp Range
(°C)
Response Time
FS2 0 to 50 0.001 Yes -20 to 150 < .5s
FS5 0 to 100 0.01 -20 to 150 (450) < 2s
MicroflowSens 0 to 1 0.0001 Yes -20 to 150 < 10ms
MFS02 0 to 2 (50) 0.001 Yes -40 to 150 < 10ms

Liquid Flow

Product
(Links to PDF)
Measuring Range
(m/s)
Sensitivity (m/s) Indicates Flow
Direction
Temp Range
(°C)
Response Time
FS1L 0 to 10 0.01   -30 to 150 (250) < 100ms
FS1LA           0 to 10 0.01 -30 to 150 < 100ms
FS5L 0 to 10 0.01 -30 to 100 (250) < 100ms
FS5LA 0 to 10 0.01   -30 to 100 < 100ms
Sensors in Tray